Data Sheets

MBE Systems

• OCTOPLUS 300  

• OCTOPLUS 400  

• OCTOPLUS 500  

• OCTOPLUS 500 EBV  

• OCTOPLUS-O 400  

Annealing

• Rapid Thermal Annealing System AO 500 / AO 600 

Substrate Manipulation

• Subtrate Manipulator SH  

Effusion Cells

• Standard Effusion Cell WEZ 

• Production Effusion Cell PEZ 

• Low Temperature Effusion Cell NTEZ 

• Thermal Cracker Cell TCC 

• Organic Material Effusion Cell OME  

• High Temperature Effusion Cell HTEZ 

• High Temperature Effusion Cell HTEZ-W 

• GaP Decomposition Source DECO 

• Silicon Sublimation Source SUSI  

• Carbon Sublimation Source SUKO  

• Atomic Carbon Sublimation Source SUKO-A 

Source Clusters

• Dual Cluster Source DCS 40-2x1-14-2S 

• Quad Cluster Source QCS 

Doping Cells

• Dual Doping Source DDS  

• Boron Doping Source EBVV-B 

Valved Sources

• As-Valved Cracker Source VACS 

• P-Valved Compound Source VGCS 

• S-Valved Cracker Source VCS 

• Se-Valved Cracker Source VSCS 

• Valved Corrosive Material Cracker Source VCCS  

• Cs/Rb-Valved Alkali Metal Source AKS  

• Hg-Valved Mercury Evaporation Source HGS  

• Valved Sulfur Source VSS 

E-beam Evaporators

• Electron Beam Evaporator EBV  

• Multi-pocket Evaporator EBVM  

• Vertical Electron Beam Evaporator EBVV  

Organic Evaporators

• Organic Material Effusion Cell OME  

• Organic Material Effusion Cell OEZ 

• Organic Material Effusion Cell Clusters OEZ Clusters 

Gas Sources

• Hydrogen Atom Beam Source HABS  

• Oxygen Atom Beam Source OBS  

Equipment

• Beam Flux Monitor BFM  

Industrial Sources

• Point Sources PEZ-G