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VACS 63-350-K-M, valved arsenic cracker on DN63 CF (O.D. 4.5")
mounting flange with 350 cm³ crucible, cooling shrouds, motor drive |
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- Compatible with all MBE systems
- Large crucible capacity - 350 cm³ and 500 cm³
- Precise and very fast flux control
- Easy handling and refilling procedure
- Integrated water cooling shrouds
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The Valved Arsenic Cracker Source - VACS - is designed for high performance growth of III-V materials.
The VACS is highly specialized for As4 or As2 sublimation and combines large crucible capacity of 350 cm³ or more with a precise and fast flux control. A flux control range of more than two orders of magnitude is provided by the integrated valve mechanism.
The valve unit can be operated manually or with an additional valve control unit (MVCU) which controls the valve position from an external analogue voltage (0...10V), see picture.
The integrated water cooling shroud and the use of selected materials for cell and valve unit guarantee high purity operation conditions. The operation mode of the source can be easily changed from As4 to As2 growth by the operation conditions of the integrated cracker unit.
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VACS design option with motor drive and
motorized valve control unit MVCU |
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The special design allows an easy refilling of the crucible from the backside without removing the cell from the chamber. This simplifies your maintenance work and saves your time.
The typical valve characteristic, i.e. the beam equivalent pressure (BEP) as a function of the valve position, is shown on the right. The graph indicates the wide flux range of more than two orders of magnitude which is smoothly controlled on a wide value position range of several millimetres. This smooth operation condition guarantees a precise and reproducible flux control for your application. Together with a high motor speed of 10 mm/s a fast control is reached.
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