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SH 150-2Pt25-S

SH 150-2PT25-S, substrate manipulator on DN150 CF (O.D. 8")
mounting flange; for a 2 inch wafer, with noble-metal-alloy heater and
25 mm linear travel for substrate transfer; with integrated main shutter

  
  • Oxygen resistance option for SH substrate manipulators
  • Substrate temperatures up to 700°C with Ni-alloy heater and up to 900°C with noble-metal-alloy heater
  • Pressure range from UHV up to several mbar
  • Water cooled ceramic bearings for continuous rotation
  • Substrate sizes up to 6 inch
 
 
 
 

MBE-Komponenten GmbH offers ovens and heaters, which are resistant to oxygen or reactive gas atmosphere. The oxygen resistance option is indicated by the affix "-O".
Selected shielding and construction materials are used for high temperature applications in oxygen rich environments. Maximum substrate temperatures of 700°C are possible using Ni-alloy heaters. Noble-metal-alloy heaters work well for higher substrate temperatures of up to 900°C.

Due to the wide range of different applications and processes in oxygen rich environments a general recommendation of heater and construction materials is difficult. Please contact our specialists for your application.

The specifications and options for SH-O substrate manipulators are almost the same as for all our SH models:
- sample size up to 6"
- continuous substrate rotation
- water cooled ceramic bearings
- linear travel for substrate transfer
- thermocouple: Type K Chromel/Alumel (types R or S on request)
- integrated main shutter.

   Pt-heater for SH 150-4Pt25

4" substrate heater with noble-metal-alloy wire

  
 
 
 
 

Application

SH-O substrate manipulators are used in oxygen rich environments (up to several mbar) or reactive gas atmosphere.

Attention:
Special care must be taken when compounds are operated at high temperature and high pressure. In case of pressures above 10-4 mbar the thermal conductivity of gases has significant effects to heat transfer from heater to sample. It is strongly recommended to contact our specialists when planning your application.

 
 
 

Technical Data

Heater type Ni-alloy wire (Ni) or noble-metal-alloy wire (Pt)
Thermocouple Chromel/Alumel (type K);  (others on request)
Bakeout temperature 300°C
Wafer temperature max. 700°C with Ni-alloy heater, max. 900°C with noble-metal-alloy heater
Electrical contacts copper-free contacts for metal heater
Linear travel 25 mm standard, 30-50 mm on request
Options integrated main shutter (S);
electrically insulated wafer holder with additional feedthrough for bias voltage (B); wafer holder made of tantalum (T)
  
 
 

Dimensions

SH 150-2Pt25-S drawing

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

 
 
 

 LAST UPDATE: FEBRUARY, 2006

© 2003 Dr. Eberl MBE-Komponenten GmbH