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Dr. Eberl MBE Komponenten GmbH provides custom-made linear deposition sources for applications in thin film deposition like fabrication of solar cells and organic LEDs or window coating etc.
Each linear deposition source is custom-designed to fit into our customers' deposition systems. Special versions for top-down evaporation are offered on request.
The evaporation sources are based on our thermal evaporation (LWEZ), cracker or e-beam evaporation sources. Adequate cooling as well as special shutter assemblies are also available.
We offer a complete solution including Monte-Carlo-simulation of the deposition process on larger area substrates in order to ensure specified film thickness and homogeneity within the customer boundary conditions like substrate size and source-to-substrate distance etc.
Based on these simulations we commonly design beam-shaping apertures that improve material utilization by providing best possible lateral homogeneity on the substrate (typically few %) while drastically reducing beam intensity beyond the substrate.
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View onto heater of LWEZ evaporator
LWEZ graphite crucible |
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