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Power Supply and Temperature Control
PS
Cables and Connectors
CA
Manipulator Control Unit
MCU
Cryopump Valve Control Unit
CVCU
Beam Flux Monitor
BFM
Cooling Shroud
CS
Shutter
S


Shutter Control Unit
SCU
Soft-acting Rotary Shutter Module
RSM
Soft-acting Linear Shutter Module
LSM
Magnetic Rotary Feedthrough
MRD
Viewport Shutter
FSH
Refractory Metal Parts
RMP



Crucibles
CRU
 

 LAST UPDATE: FEBRUARY, 2008

© 2003 Dr. Eberl MBE-Komponenten GmbH