Dr. Eberl MBE-Komponenten GmbH - low temperature effusion cell NTEZ

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EFFUSION CELLS / OTHER SOURCES

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PEZ I WEZ I NTEZ I OME I HTEZ I HTS I OREZ I DECO I SUSI I SUKO

	NTEZ 40-10-22-KS-SF, low temperature effusion cell on DN40 CF flange with integrated cooling shroud and shutter; quartz and PBN crucibles		Compatible with all MBE systems All standard crucibles available, crucible capacities 2-200 cm³ Excellent temperature stability and controllability in the range 80-700°C High reliability and long lifetime Hot lip, cold lip and dual filaments Optional: on cell flange integrated cooling shroud and shutter


	The Low Temperatur Effusion Cell NTEZ is designed for evaporation of materials with high vapour pressure, requiring extremely good temperature regulation below 700°C. Standard effusion cells have extensive heat shielding for high temperature operation. This is not ideal for the heat transfer and makes it difficult to regulate these cells at lower temperatures, when there is minor heat radiation. Our low temperature effusion cells are optimised for the operating temperature ranges 80-350°C or 350-700°C, to obtain best temperature stability and controllability. Similar to our standard effusion cells, the crucible is heated by a tantalum wire filament supported by PBN rings (see figure). Low temperature operation is optimised by reducing heater wire density to provide a lower thermal load. For more details about the heating assembly see page "WEZ". Standard, hot lip, cold lip and dual filament types are available, covering different evaporation material requirements. In addition to standard crucible material PBN (pyrolytic boron nitride), other crucible materials such as Al₂O₃, PG or quartz are also available.		Schematic of the wire heating assembly

	Application The low temperature effusion cell NTEZ is recommended for materials with high vapour pressure, e.g. organic materials, As, Sb, P, Ba, Bi, K, Li, Mg, Ca, CdSe, etc, which are evaporated or sublimated at temperatures in the range 80-700°C. Modified low temperature effusion cells for reactive low pressure gas atmospheres (e.g. O₂, N₂, NH₃) are available on request. The NTEZ is used for sample preparation, thin film growth and MBE applications. For instance, the NTEZ 40-10-22-KS is particularly suited to material deposition on small samples in surface analysis systems. For MBE applications we offer sources tailored to the different evaporation material requirements. NTEZ cells can be used both for growth and doping applications.

Technical Data

Filament type	Ta wire heating filament: standard filament (SF), hot lip (HL), cold lip (CL) and dual filament (DF)
Thermocouple	Chromel/Alumel (type K); (type C on request)
Bakeout temperature	300°C
Operating temperature	80-350°C / 350-700°C (specify temperature range when ordering)
Outgassing temperature	max. 1100°C, depending on cell design (max. 700°C with quartz crucible)
Cooling	integrated water cooling or separate cooling shroud
Crucibles	2-200 cm³; PBN, PG, quartz crucibles, other materials on request
Options	integrated water cooling shroud (K), integrated shutter (S); downwards looking (face down) cells available on request

	Crucibles We provide all standard crucible shapes and sizes to ensure compatibility to all MBE systems. The standard size ranges from 2 to 200 cm³. Beside the standard cylindrical crucible shape we also supply conical crucibles (C) (e.g. taper angle 7°). Other dimensions and shapes are possible on request. Standard crucible material is PBN, but other crucible materials are also available. Quartz crucibles (Q) are an economical alternative for some materials, e.g. organic compounds. For detailed information see page "Crucibles". The second number in our Product-code is the crucible capacity [in cm³], the third number indicates the lip diameter of the crucible. Please specify crucible material if not PBN.

	Dimensions Drawing shows NTEZ 40-10-22-S

Specific Data

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

System manufacturer: MBE-Komponenten, Omicron and other manufactures not separately listed

				[cm³]	[mm]			Type	Type		[mm] / [mm]		[W] / [A]	Product Code	Product Code
		NTEZ	16 -	2 -	16 -			SF¹ -	K -	P -	LxxxD16		50 / 4	PS 30-10-C	PBN 2-16
		NTEZ	16 -	5 -	16 -			SF¹ -	K -	P -	LxxxD16		50 / 4	PS 30-10-C	PBN 5-16
		NTEZ	40 -	2 -	16 -		S* -	SF¹ -	K -	P -	LxxxD16		50 / 4	PS 30-10-C	PBN 2-16
		NTEZ	40 -	2 -	16 -	K	S* -	SF¹ -	K -	P -	LxxxD34		50 / 4	PS 30-10-C	PBN 2-16
		NTEZ	40 -	5 -	16 -		S* -	SF¹ -	K -	P -	LxxxD16		50 / 4	PS 30-10-C	PBN 5-16
		NTEZ	40 -	10 -	22 -		S* -	SF² -	K -	P -	LxxxD34		120 / 6	PS 30-10-C	PBN 10-22
		NTEZ	40 -	10 -	22 -	K	S* -	SF² -	K -	P -	LxxxD36		120 / 6	PS 30-10-C	PBN 10-22
		NTEZ	40 -	16 -	36 -		S* -	SF² -	K -	P -	LxxxD36		180 / 8	PS 30-10-C	PBN C16-36
		NTEZ	40 -	35 -	34 -		S* -	SF² -	K -	P -	LxxxD34		180 / 8	PS 30-10-C	PBN 35-34
		NTEZ	40 -	60 -	37 -			SF² -	C -	P -	LxxxD38		200 / 8	PS 30-10-C	PBN 60-37
		NTEZ	63 -	35 -	34 -	K	S* -	SF² -	C -	P -	LxxxD58		250 / 11	PS 30-10-C	PBN 35-34
		NTEZ	63 -	60 -	37 -			SF² -	C -	P -	LxxxD38		240 / 8	PS 30-10-C	PBN 60-37
		NTEZ	63 -	60 -	37 -	K	S* -	SF² -	C -	P -	LxxxD58		240 / 8	PS 30-10-C	PBN 60-37
		NTEZ	63 -	60 -	54 -		S* -	SF² -	C -	P -	LxxxD55		280 / 9	PS 30-10-C	PBN C60-54
		NTEZ	63 -	125 -	54 -		S* -	SF² -	C -	P -	LxxxD55		280 / 9	PS 30-10-C	PBN 125-54
		NTEZ	63 -	200 -	58 -			SF² -	C -	P -	LxxxD58		320 / 9	PS 35-20-C	PBN 200-58

* rotary shutter possible on same flange	¹ alternatively CL
** PBN as standard, other materials on request	² alternatively CL, HL, or DF
*** specify UHV length L with order
Example for Product Identfication Code: NTEZ 63-60-37-KS-CL-C-P-L277D58 is a standard effusion cell on DN63 CF flange with 60cm³ PBN crucible, integrated water cooling shroud, shutter, cold lip filament, type K thermocouple and UHV-length 277mm.



LAST UPDATE: MAY, 2006		© 2003 Dr. Eberl MBE-Komponenten GmbH