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HTEZ 40-10-32, high temperature effusion cell on DN40 (O.D.2.75") CF-flange, with 10 cm³ BeO crucible

• Compatible with all MBE systems
• Various crucible sizes and materials,
  crucible capacities 1.5, 10, 35 cm³
• Self-supporting tungsten wire heater or free-standing tungsten filament
• Clean operation in UHV up to 2000°C
• High reliability and long lifetime
• Compact cell design
• Cell option with integrated cooling shroud and shutter

The High Temperature Effusion Cell HTEZ is designed for clean UHV operation up to 1900°C (2000°C with model HTEZ-W).
This is achieved by, respectively, a self-supporting tungsten filament for HTEZ and a free-standing tungsten filament of thick W-wire for HTEZ-W. The schematic drawing shows the main parts of the HTEZ heating system. Compared with the HTS source, the deep crucible also allows operation in angled port positions. It is predominantly heated from the side, combining large crucible capacity with high temperature operation.

Similar to our standard WEZ heating system, only selected refractory metals are used in the hot zone. Due to the high operating temperature the filaments are made of tungsten while direct contact between filament and insulation parts is avoided. The HTEZ-W does fully without any additional insulating PBN ceramic plates. Where they are used in the HTEZ they are shielded by tantalum plates to avert outgassing during operation. The thermocouple is mounted close to the crucible.

The HTEZs from MBE-Komponenten GmbH are highly efficient and provide a very reproducible temperature measurement and precise regulation. The well-designed tungsten filaments are stable and guarantee a long lifetime.

Main parts of the HTEZ, schematic

The design of our HTEZ allows the usage of ceramic crucibles (e.g. Al₂O₃, BeO) directly mounted into the cell without an outer tungsten crucible. Thus higher evaporation material temperatures can be achieved in the crucible.

The smaller crucible version (1.5 cm³) of the HTEZ allows building the cell mounted in a cooling shroud with shutter on a DN40 (O.D.2.75") CF-flange, with a maximum outer diameter in UHV of 36 mm.

For larger cells separate cooling shrouds are recommended to avoid overheating of stainless steel parts within the UHV chamber during operation. Optionally the larger cells are delivered with an integrated shutter on the cell flange.

Application

The HTEZ is designed for low vapour pressure elements and compounds evaporated or sublimated at temperatures up to 2000 °C, e.g. materials like Fe, Cr, Ni, Co, Cu, Pt, Ti, etc.
For evaporation of Fe, Ni or Co we provide a special designed source with BeO crucible.

Technical Data

Crucibles

Standard crucible sizes for our HTEZ are 1.5, 10 and 35 cm³. Other shapes and dimensions on request.
We provide different crucible materials such as Al₂O₃, BeO, Ta, W, special lined pyrolytic graphite (PG) and pyrolytic boron nitride (PBN). Examples are shown in the picture on the right hand side.
The maximum operating temperature of the HTEZ may be reduced depending on the crucible material, e.g. for PBN max. 1500°C. With some evaporants cell operation is limited to temperatures <1900°C due to interactions with crucible material.
For detailed information see page "Crucibles".

The second number in our Product-code is the crucible capacity [in cm³]; the third number indicates the lip diameter of the crucible. Please specify crucible material when ordering!

Crucibles for HTEZ made of Al₂O₃, BeO and
refractory metals (W, Ta), sizes 1.5 and 10 cm³

Dimensions

Specific Data

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

System manufacturer:    MBE-Komponenten, Omicron and other manufactures not separately listed
				[cm³]	[mm]				[mm] / [mm]		[W] / [A]	Product Code	Product Code
		HTEZ	40 -	1.5 -	19 -	K	S* -	A -	LxxxD36		350 / 14	PS 35-20-C	Al2O3 1-19
		HTEZ	40 -	10 -	32 -		S* -	A -	LxxxD36		1050 / 15	PS 70-22-C	Al2O3 10-32
		HTEZ	63 -	35 -	54 -		S* -	A -	LxxxD56		1300 / 15	PS 70-22-C	Al2O3 C35-54
		HTEZ-W	40 -	10 -	32 -		S* -	A -	LxxxD36		1200 / 40	PS 35-45-C	Al2O3 10-18

 LAST UPDATE: APRIL, 2009

© 2003 Dr. Eberl MBE-Komponenten GmbH