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MEZ 16-5, mini effusion cell on DN16 (O.D. 1.33") CF-flange with
5.6 cm³ PBN crucible

• Smallest effusion cell on DN16 flange
• Designed for mini MBE systems
• Compact cell design
• Crucible capacity 5.6 cm³
• Hot lip, cold lip, standard filaments
• Molybdenum-free construction
• Very low power consumption
• Optional for low temperature use

The Mini Effusion Cell - MEZ - is the smallest effusion cell with a 5.6 cm³ crucible, mounted on an 1.33 inch flange.

The MEZ is designed for evaporation of materials in MBE systems, in the temperature range from 50°C to 1400°C.
Our specially designed heating system and temperature measurement concept allows very good regulation, reduces the power consumption and provides excellent flux control.

MBE-Komponenten GmbH was the first company to build a 5.6 cm³ effusion cell, which is based on a DN16 CF (O.D. 1.33") flange and provides the same features as our standard effusion cell: max. temperature 1400°C, most efficient heat transfer, excellent flux control, etc. This cell design is only possible in combination with our direct touching heating system and temperature measurement (see figure on the right).

The MEZ is designed for mini MBE systems and cluster source flanges for standard MBE systems.

Heating system and position of thermocouple

Application

The mini effusion cell is recommended for elements and compounds evaporated or sublimated at temperatures in the range 50-1400°C, e.g. Ga, In, Al, Si, Ge, Cu, Ag, BaF₂, CaF₂, etc.

For very low temperature applications in the range 50-350°C (organic evaporants) we offer a special version of the MEZ, (option=NT). A modified radiation shielding improves the controllability at low temperatures.

Its small size makes the mini effusion cell perfectly suitable for operation on a mini MBE system.
Mini MBE systems are commonly used in research when there is no need for large area homogenous growth. The compactness and the low power consumption of the MEZ are drastically reducing the operating costs. In some cases no additional cooling shroud is needed.

MEZ cells can also be used as doping sources in standard MBE systems.
Due to the small size of the MEZ it is possible to mount more than one effusion cell on a single flange. We offer individually designed clusters, for example a mini effusion cell MEZ 16-5 and a mini high temperature effusion cell HTEZ 40-1.5 (for temperatures up to 1900 °C) with cooling shroud and shutters on one single DN63 CF (O.D. 4.5") flange. Find out more about clusters on page "Dual Dopant Sources".

Technical Data

Crucibles

Due to the small size of the MEZ only 5.6 cm³ PBN crucibles are available. For detailed information see page "Crucibles".

Dimensions

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

Specific Data

 LAST UPDATE: NOVEMBER, 2004

© 2003 Dr. Eberl MBE-Komponenten GmbH