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EBVM 200-4x8, multi-pocket linear e-beam evaporator mounted on
DN200 (O.D.10") CF-flange, crucible capacity 4x8 cm³ (4-pocket);
also available with 3x15 cm³ crucible (3-pocket evaporator) |
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- NEW linear multihearth UHV evaporator
- 100% UHV integrity by hermetic all-metal sealed design, low outgassing
- Bakeout temperature 250°C
- Evaporation origin aligned on flange centre
- Reliable manual linear translation,
optional motorized translation with optical positioning
- Hearth volumes 8cm³ (x4) or 15cm³ (x3)
- Long filament life with 270° beam deflection
- High frequency beam deflection system
 Multi-pocket Evaporator Data Sheet ( 231 kB pdf-file )
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The new Multi-pocket Evaporator - EBVM - is available now!
MBE-Komponenten GmbH is pleased to offer you a new range of multihearth electron beam evaporators for use in ultra-high vacuum (UHV) applications: EBVM 200-4x8 and EBVM 200-3x15, optional with integrated source shutter.
Our new Multi-pocket Evaporators combine great flexibility in evaporating up to four different materials from a single source for your thin film growth requirements with a compact design based on a horizontal DN200 CF flange. All electrical and utility feedthroughs are included on this support flange, allowing easy integration into your UHV system.
For easy installation and system maintenance we provide an optional mounting guide rod system. See the picture on the right.
On the EBVM 200 only UHV-grade materials are used without any compromise. The electromagnetic deflection coils are manufactured from KaptonTM (polyimide) isolated wires and nickel-plated magnetic steel, the permanent magnets are of a high temperature rare earth alloy and the multihearth crucible is manufactured from high purity OFHC-copper (Oxygen-Free High-Conductivity copper).
Individual water cooling circuits of both, fixed and movable parts of the copper hearth assembly, ensure cool operation and low outgassing even at high power operation.
Optionally, the EBVM 200 can be equipped with a linear shutter. A customized water-cooled roof can be installed on request. The standard manual pocket translation can be upgraded with a motorized pocket indexing drive with position feedback for the drive controller.
The minimum flange to pocket centre distance is 250 mm and can be increased to adapt to your system. We are pleased to assist you in integrating the EBVM 200 into your existing UHV system. Don't hesitate to contact us for further information and advice for your special application. |
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Movable multi-pocket OFHC Cu-slide, capacity 4x8 cm³
(3x15 cm³ also available)
EBVM 200-4x8-S, multi-pocket evaporator
mounted on guide rod system and equipped with
magnetically coupled linear shutter |
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