Glossary
Glossary
sccm  is an abbreviation of standard cubic centimeters per minute indicating a flow rate which is equivalent to a flow of 1cm³ under normal conditions (1013 hPa ambient pressure and 0°C) per minute.
1 sccm = 1013 hPa * 0,001 l / 60 s =  0.0169 mbar l /s

(1 hPa = 1 mbar)